300mm Anodized Aluminum Platen Heater
300mm Anodized Aluminum Platen Heater
SKU:200-462341
Premium 300mm Aluminum Platen Heater for precise semiconductor processing with world-class performance.
Regular price
$799.99
Regular price
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$799.99
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300mm Anodized Aluminum Platen Heater
$799.99
Quantity: 1
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300mm Anodized Aluminum Platen Heater
$799.99
Quantity: 1
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The 300mm Anodized Aluminum Platen Heater is a premium solution for semiconductor processing and research. Constructed from Aluminum Alloy 356, this heater boasts a surface flatness of < 0.0005 in | 0.013 mm and surface temperature uniformity of ±0.3%, ensuring precise wafer processing. With a typical voltage of 208V and power output of 3350W, this heater operates at temperatures up to 752 ºF (400 ºC) with world-class performance. Ideal for 200 and 300 mm wafer processing, it offers reliability and long product life, making it a cost-effective choice for institutions requiring high-quality platen heaters.
Product Specifications
Additional Information 0
This platen heater design is ideal for prototype machine trials or engineering experiments as well as temporary repairs until custom heaters can be manufactured. CAS platen heaters provide a complete turnkey solution and are available in anodized finish, or in bare machined aluminum 356 with optional add-on features. The stock anodized cast aluminum platen heaters are complete, ready to install parts and are available for shipment within one business day.Part is ultrasonic washed followed by IPA wipe down prior to packaging.
Applications 0
Semiconductor processing.Semiconductor research and development.
Features And Benefits 0
Stock deliveryAssures a cost effective option for 200 and 300 mm wafer processing.World class performance"Cast-in" reliability assures long product life.Operating temperatures up to 752 ºF (400 ºC) for a wide range of process applications.Surface temperature uniformity of ±0.3% of set point assures wafer processing accuracy.
Specifications Cleaning
Ultrasonic wash followed by IPA wipe down
Specifications Delivery Time
6 to 8 weeks
Specifications Heater Shape
Platen
Specifications Material
Aluminum Alloy 356
Specifications Surface Flatness
< 0.0005 in | 0.013 mm
Specifications Surface Temperature Uniformity
±0.3% of set point based on measurements at laboratory ambient conditions
Specifications Thermocouple Type
J, 12 in. (305 mm) Sheath + Fitting
Specifications Power
3350 W
Specifications Voltage
208 V