300mm Anodized Aluminum Platen Heater
300mm Anodized Aluminum Platen Heater
SKU:200-d54ad0
High-performance 300mm Anodized Aluminum Platen Heater for precise semiconductor processing. Quick delivery & cost-effective.
Regular price
$799.99
Regular price
Sale price
$799.99
Unit price
per
Delivery via Maden
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The 300mm Anodized Aluminum Platen Heater is a high-performance solution for semiconductor processing and research. With a typical voltage of 208V and power of 3350W, this heater offers world-class surface flatness of < 0.0005 in. Ideal for wafer fabrication, it ensures surface temperature uniformity of ±0.3%, guaranteeing precise processing. Featuring 'cast-in' reliability and operating temperature up to 752 ºF, this platen heater is a cost-effective option with quick delivery, making it suitable for 200 and 300mm wafer applications.
Product Specifications
Additional Information 0
This platen heater design is ideal for prototype machine trials or engineering experiments as well as temporary repairs until custom heaters can be manufactured. CAS platen heaters provide a complete turnkey solution and are available in anodized finish, or in bare machined aluminum 356 with optional add-on features. The stock anodized cast aluminum platen heaters are complete, ready to install parts and are available for shipment within one business day.Part is ultrasonic washed followed by IPA wipe down prior to packaging.
Applications 0
Semiconductor processing.Semiconductor research and development.
Features And Benefits 0
Stock deliveryAssures a cost effective option for 200 and 300 mm wafer processing.World class performance"Cast-in" reliability assures long product life.Operating temperatures up to 752 ºF (400 ºC) for a wide range of process applications.Surface temperature uniformity of ±0.3% of set point assures wafer processing accuracy.
Specifications Cleaning
Ultrasonic wash followed by IPA wipe down
Specifications Delivery Time
6 to 8 weeks
Specifications Heater Shape
Platen
Specifications Material
Aluminum Alloy 356
Specifications Surface Flatness
< 0.0005 in | 0.013 mm
Specifications Surface Temperature Uniformity
±0.3% of set point based on measurements at laboratory ambient conditions
Specifications Thermocouple Type
K, 6 in. (152 mm) Sheath + Fitting
Specifications Power
3350 W
Specifications Voltage
208 V