Anodized Aluminum Platen Heater - 200mm
Anodized Aluminum Platen Heater - 200mm
SKU:200-83a361
Efficient 200mm Anodized Aluminum Platen Heater for precise surface temperature control in semiconductor processing.
Regular price
$1,299.99
Regular price
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$1,299.99
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Anodized Aluminum Platen Heater - 200mm
$1,299.99
Quantity: 1
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Anodized Aluminum Platen Heater - 200mm
$1,299.99
Quantity: 1
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The 200mm Anodized Aluminum Platen Heater is a reliable off-the-shelf solution for wafer fabrication, offering significant cost savings by eliminating additional engineering and tooling expenses. Constructed from Aluminum Alloy 356, this heater provides precise and uniform surface temperature control, essential for semiconductor processing and research. With a quick delivery time of 6 to 8 weeks, this heater ensures operational efficiency and longevity, operating at temperatures up to 752 ºF (400 ºC) with ±0.3% surface temperature uniformity. Ideal for 200mm wafer processing, this platen heater guarantees world-class performance and durability.
Product Specifications
Additional Information 0
This platen heater design is ideal for prototype machine trials or engineering experiments as well as temporary repairs until custom heaters can be manufactured. CAS platen heaters provide a complete turnkey solution and are available in anodized finish, or in bare machined aluminum 356 with optional add-on features. The stock anodized cast aluminum platen heaters are complete, ready to install parts and are available for shipment within one business day.Part is ultrasonic washed followed by IPA wipe down prior to packaging.
Applications 0
Semiconductor processing.Semiconductor research and development.
Features And Benefits 0
Stock deliveryAssures a cost effective option for 200 and 300 mm wafer processing.World class performance"Cast-in" reliability assures long product life.Operating temperatures up to 752 ºF (400 ºC) for a wide range of process applications.Surface temperature uniformity of ±0.3% of set point assures wafer processing accuracy.
Specifications Cleaning
Ultrasonic wash followed by IPA wipe down
Specifications Delivery Time
6 to 8 weeks
Specifications Heater Shape
Platen
Specifications Material
Aluminum Alloy 356
Specifications Maximum Power
2241 W
Specifications Maximum Voltage
240 V
Specifications Surface Flatness
< 0.0005 in | 0.013 mm
Specifications Surface Temperature Uniformity
±0.3% of set point based on measurements at laboratory ambient conditions
Specifications Thermocouple Type
K, 12 in. (305 mm) Sheath + Fitting
Specifications Power
1681 W
Specifications Voltage
208 V