CAS PUR-X 1000 Circulation Heater Tube
CAS PUR-X 1000 Circulation Heater Tube
SKU:CAS-f79a30
Precision heating solution for semiconductor and high-purity applications. Compliant with SEMI F57 standards.
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CAS PUR-X 1000 Circulation Heater Tube
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CAS PUR-X 1000 Circulation Heater Tube
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The CAS PUR-X 1000 Circulation Heater Tube is designed for contamination-free heating of liquids and gases in demanding applications like semiconductor solvent heating and high-purity liquid heating. With power options ranging from 1.5 to 4.5 kW and a maximum operating temperature of 392 ºF, this heater ensures precision and efficiency. Compliant with SEMI F57 standards, featuring explosion-resistant housing, PTFE coating, and replaceable tubing for ease of maintenance, it offers reliable high-purity heating solutions for semiconductor wet process systems, wafer cleaning, DI water heating, and more.
Product Specifications
Additional Information 0
Tubing, 0.375" (3/8") O.D. x 0.031" wall, field replaceableStandard PFAHigh purity PFA, SEMI F57 compliant325" Long (27 ft or 8.3 m)Tube size & length are the same for both standard PFA and high purity PFATwo sensors, for process control and process high - limit, choice of J or K type thermocouplesThird sensor (J or K type, matching the selected process sensors) for casting and tube protection. Requires independent high limit control loop set no higher than 235 ºC (455 ºF)
Applications 0
Semiconductor wet process systemsWafer cleaning equipment (wet bench systems)Heating of photo-resist removal solventsDI water heating for wafer rinsingAir and Nitrogen heating for wafer dryingAcid heating
Features And Benefits 0
Heating elements cast in aluminumLow maintenancePTFE - coated for easy cleaningHigh purity heatingFluid path independent of heater sheathNon - welded constructionSelf - drainingReplaceable tubing
Size And Weight Heater Outside Diameter
4.3 in | 10.9 cm
Size And Weight Height
16.5 in | 41.9 cm
Size And Weight Weight
22 lb | 9.9 kg
Specifications Body Material
Aluminum 319
Specifications Coating
PTFE
Specifications Compliance
SEMI F57
Specifications Electrical Enclosure Features
Explosion Resistant
Specifications Input Voltage
120 V | 200 V | 208 V | 220 V | 230 V | 240 V | 380 V | 400 V | 415 V | 480 V
Specifications Maximum Operating Pressure
70 psi | 480 kPa
Specifications Maximum Operating Temperature
392 ºF | 200 ºC
Specifications Optional Features
Optional Insulation JacketOptional Fittings, PFA 3/8" Straight Union, SEMI F57 Compliant
Specifications Power
1.5 to 4.5 kW
Specifications Target Markets
Semiconductor solvent heatingHigh - purity liquid heating
Specifications Terminal Housing
NEMA 7
Specifications Thermocouple Type
J | K
Specifications Tubing Length
190 in | 15.8 ft | 4.8 m
Specifications Tubing Material
High Purity PFA | Standard PFA
Specifications Tubing Outer Diameter
0.375 in
Specifications Tubing Wall Thickness
0.031 in