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High-Efficiency Universal Solvent Circulation Heaters

High-Efficiency Universal Solvent Circulation Heaters

SKU:UNI-fba9d8

Efficiently heat low flash point solvents with precision and safety in semiconductor processes.

Regular price $799.99
Regular price Sale price $799.99
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High-Efficiency Universal Solvent Circulation Heaters

High-Efficiency Universal Solvent Circulation Heaters

$799.99

Quantity: 1

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High-Efficiency Universal Solvent Circulation Heaters

High-Efficiency Universal Solvent Circulation Heaters

$799.99

Quantity: 1

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The High-Efficiency Universal Solvent Circulation Heaters are designed for safe and precise heating of low flash point solvents in semiconductor wet process systems. Featuring cast aluminum construction with seamless 316L stainless steel tubing, these heaters ensure contamination-resistant surfaces and efficient heat transfer. With an explosion-proof NEMA 7 enclosure, UL®/CSA recognized heater elements, and compliance with industry standards, these circulation heaters deliver reliable performance in demanding environments. The self-draining design, high-pressure operation capability, and over-temperature protection enhance safety and productivity in various applications.

Product Specifications

Additional Information 0
The universal solvent circulation heater provides a safe and efficient means of heating low flash point solvents. Both the heating elements and the solvent tube are cast into the aluminum. The heating elements provide heat to the aluminum mass and the mass transfers this heat to the tube carrying the solvent. The casting can also be surrounded by insulation to minimize heat loss and keep equipment cabinet temperatures low. A secondary chilled water tube is also cast-in. This tube quickly cools the casting for routine maintenance or lowers the solvent below the flash point.Safety features of the universal solvent circulation heater include a NEMA 7 rated (explosion proof) enclosure box covering the electrical connections and a snap-action over temperature protection switch to provide safe shut down. The casting body is PTFE coated to protect the aluminum in case of accidental contact with solvents.The universal solvent circulation heater is appropriate for numerous applications and may be customized to meet specific customer needs.High limit, auto resetting snap-action switch.
Applications 0
Semiconductor Wet Process Systems.Wafer Cleaning Equipment (Wet Bench Systems).Post Etch Wet Strip and Photoresist Removal Applications.Heating of Low Flash Point Solvents such as EKC, ACT and NMP.
Features And Benefits 0
Fluid path constructed independent from heater sheathAllows solvent to never be in contact with heater element.Eliminates hot spots caused by poor flow or start up conditions.Cast aluminum constructionAllows accurate process temperature control.Provides rugged design and durability.Higher reliability due to fewer components and non-welded construction.Ensures longer heater life.Material compatibility with most semiconductor solvents316L Stainless Steel passivated and electropolished solvent tube.Ensures contamination resistant surface for heated solvent.Assures higher reliability and cleanliness due to seamless tubing.Operates to 1500 psi or greater with appropriate fittingsEnables economic high pressure operation.Self-draining construction when mounted verticallyEliminates trapped material that may add contamination to the process.Saves on operating time.Agency ratings to comply with safety standardsUL®/CSA recognized heater elements.NEMA 7 Class 1, Div. 1 and 2, Groups B, C and D electrical enclosure.Reduces risk of accidental combustion of solvent vapors.
Fitting Connections 0
Flaretek® or Swagelok VCR fittings on solvent tube.National Pipe Thread (NPT) or Swagelok VCR fittings on cooling tube.
Note 0
Note for Casting Dimensions - Dimensions above do not include tube fittings and mounting bosses.
Sensorsswitches 0
2 cast-in Type J thermocouples sense solvent tube inlet and outlet temperatures.1 replaceable Type J thermocouple senses casting core temperature.Mechanical snap action switches for over temperature protection.
Specifications Accessories
Insulating jacket | None
Specifications Ambient Operating Temperature
392 ºF | 200 ºC
Specifications Casting Diameter
5.75 in | 146 mm
Specifications Casting Height
8.5 in | 216 mm
Specifications Cooling Fitting
Swagelok VCR | 90º 1/4 NPT female
Specifications Enclosure Diameter
4.75 in | 121 mm
Specifications Enclosure Height
5 in | 127 mm
Specifications Enclosure Rate
Enclosure rated for Class 1, Div. 1 and 2, Groups B, C and D
Specifications Heater Wattage For Single Phase
6000 to 8000 W
Specifications Heater Wattage For Three Phase
7500 W
Specifications High Limit Switch
212 ºF | 365 ºF | 100 ºC | 185 ºC
Specifications Industry Standards
CSA | UL®
Specifications Maximum Temperature
400 ºF | 204 ºC
Specifications Operating Pressure
1500 psi
Specifications Optional Features
Insulating jacket
Specifications Outer Diameter Cooling Water Tube
0.25 in | 6 mm
Specifications Phase
Single | Three
Specifications Ptfe Coated Castinganodized Electrical Enclosure
Protects unit from accidental contact with corrosive process solvents
Specifications Solvent Fitting
Flaretek® | Swagelok VCR
Specifications Terminal Housing
NEMA 7
Specifications Tubing Material
316L Stainless Steel Seamless Tubes
Specifications Tubing Wall Thickness
0.049 in | 1.25 mm