PIHera Miniature Piezo Nanopositioning Stage
PIHera Miniature Piezo Nanopositioning Stage
SKU:NAN-e1e790
Achieve nanometer precision with the PIHera Miniature Piezo Nanopositioning Stage. Ideal for semiconductor metrology and research applications.
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$1,799.99
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PIHera Miniature Piezo Nanopositioning Stage
$1,799.99
Quantity: 1
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PIHera Miniature Piezo Nanopositioning Stage
$1,799.99
Quantity: 1
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The PIHera Miniature Piezo Nanopositioning Stage is a compact and precise linear translation stage that offers travel up to 950 µm. With frictionless precision, direct metrology using capacitive sensors, and position accuracy up to 0.02%, this stage ensures the highest level of precision required for semiconductor metrology applications. It features flexure guiding systems for excellent trajectory control, closed-loop operation with nanometer range repeatability, and extended piezoelectric travel ranges. Ideal for OEM applications and cutting-edge research, this stage is designed for optimal trajectory control and high bandwidth scanning.
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